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N-substituted hexamethyldisilazanes as new substances for the synthesis of functional films in the system Si-Ge-C-N-H
S. V. Sysoev, L. D. Nikulina, A. O. Kolontaeva, M. L. Kosinova, A. A. Titov, V. I. Rakhlin, I. P. Tsyrendorzhieva, A. V. Lis, M. G. VoronkovVolume:
81
Language:
english
Pages:
5
DOI:
10.1134/s1070363211120140
Date:
December, 2011
File:
PDF, 270 KB
english, 2011