Absorption technology of fine cleaning of nitrogen trifluoride from tetrafluoromethane
I. A. Blinov, D. A. Mukhortov, D. S. Pashkevich, V. B. Petrov, U. I. Alekseev, M. P. Kambur, E. S. KurapovaVolume:
84
Language:
english
Pages:
5
DOI:
10.1134/s1070427211120287
Date:
December, 2011
File:
PDF, 207 KB
english, 2011