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Plasma-chemical synthesis of silicon carbonitride films from trimethyl(diethylamino)silane
M. L. Kosinova, Yu. M. Rumyantsev, L. I. Chernyavskii, L. D. Nikulina, V. G. Kesler, E. A. Maximovskii, N. I. Fainer, V. I. Rakhlin, M. G. Voronkov, F. A. KuznetsovVolume:
36
Language:
english
Pages:
9
DOI:
10.1134/s1087659610040152
Date:
August, 2010
File:
PDF, 569 KB
english, 2010