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The mechanism of formation and some properties of thin fluorocarbon films deposited onto silicon plates by electron-beam polymerization of hexafluoropropylene from the vapor phase
M. A. Bruk, E. N. Zhikharev, I. A. Volegova, A. V. Spirin, N. V. Kozlova, E. N. Teleshov, V. A. Kal’novVolume:
52
Language:
english
Pages:
5
DOI:
10.1134/s1560090410010136
Date:
February, 2010
File:
PDF, 240 KB
english, 2010