Distinctive features and problems of CMOS technology for...

Nanotechnologies in Russia 2008 / 08 Vol. 3; Iss. 7-8

Distinctive features and problems of CMOS technology for decrease in the node size to 0.18 μm or less

G. Ya. Krasnikov, O. M. Orlov
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Volume:
3
Language:
english
Pages:
5
DOI:
10.1134/s1995078008070136
Date:
August, 2008
File:
PDF, 201 KB
english, 2008
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