Nanostructure of silicon-carbon composite thin films...

Nanotechnologies in Russia 2011 / 10 Vol. 6; Iss. 9-10

Nanostructure of silicon-carbon composite thin films obtained using magnetron sputtering technique

L. Yu. Kupriyanov, Yu. E. Roginskaya, N. V. Kozlova, E. D. Politova, V. A. Kal’nov, E. N. Zhikharev
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Volume:
6
Language:
english
Pages:
6
DOI:
10.1134/s1995078011050090
Date:
October, 2011
File:
PDF, 613 KB
english, 2011
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