Strength analysis of MEMS gyro elastic suspensions

Gyroscopy and Navigation 2010 / 10 Vol. 1; Iss. 4

Strength analysis of MEMS gyro elastic suspensions

M. I. Evstifeev, D. V. Rozentsvein, I. B. Chelpanov
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Volume:
1
Language:
english
Pages:
9
DOI:
10.1134/s207510871004005x
Date:
October, 2010
File:
PDF, 460 KB
english, 2010
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