Chemical sputtering of carbon and graphite materials in...

Inorganic Materials: Applied Research 2010 / 04 Vol. 1; Iss. 2

Chemical sputtering of carbon and graphite materials in oxygen plasma flows

V. N. Chernik, A. I. Akishin, L. S. Novikov, G. G. Bondarenko, A. I. Gaidar, Yu. S. Virgil’ev
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Volume:
1
Language:
english
Pages:
6
DOI:
10.1134/s2075113310020048
Date:
April, 2010
File:
PDF, 998 KB
english, 2010
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