ArF laser photolytic deposition and thermal modification of...

Chemical Papers 2010 / 10 Vol. 64; Iss. 5

ArF laser photolytic deposition and thermal modification of an ultrafine chlorohydrocarbon

Josef Pola, Anna Galíková, Jan Šubrt, Akihiko Ouchi
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Volume:
64
Language:
english
Pages:
5
DOI:
10.2478/s11696-010-0048-0
Date:
October, 2010
File:
PDF, 329 KB
english, 2010
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