The inductive channel effect on the parameters of the space-charge electrode sheaths in a hybrid RF discharge
A. F. Alexandrov, K. V. Vavilin, E. A. Kralkina, V. B. Pavlov, V. P. Savinov, V. G. YakuninVolume:
65
Language:
english
Pages:
3
DOI:
10.3103/s0027134910010108
Date:
February, 2010
File:
PDF, 149 KB
english, 2010