Experimental study of patterns of energy input into hybrid...

Moscow University Physics Bulletin 2010 / 08 Vol. 65; Iss. 4

Experimental study of patterns of energy input into hybrid low pressure discharge for varying RF generator power and argon pressure

A. F. Alexandrov, K. V. Vavilin, E. A. Kral’kina, V. B. Pavlov, A. A. Rukhadze, V. P. Savinov, Chen Zhao, V. G. Yakunin
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Volume:
65
Language:
english
Pages:
6
DOI:
10.3103/s0027134910040119
Date:
August, 2010
File:
PDF, 219 KB
english, 2010
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