Dynamic simulation of electrostatically controlled MEMS-capacitors in the operating temperature range (293…323) K
F. F. Kolpakov, N. G. BorzyakVolume:
51
Language:
english
Pages:
6
DOI:
10.3103/s073527270805004x
Date:
May, 2008
File:
PDF, 221 KB
english, 2008