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Choosing the geometry of a halogenide antireflection grating profile based on etching technique capabilities
D. L. Golovashkin, E. A. Yegorova, O. Yu. Moiseev, G. A. YunushevaVolume:
18
Language:
english
Pages:
3
DOI:
10.3103/s1060992x09040031
Date:
December, 2009
File:
PDF, 139 KB
english, 2009