X-ray topography analysis of bulk acoustic wave resonators

Bulletin of the Russian Academy of Sciences: Physics 2007 / 01 Vol. 71; Iss. 1

X-ray topography analysis of bulk acoustic wave resonators

D. V. Irzhak, D. V. Roshchupkin, D. V. Punegov, S. A. Sakharov
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Volume:
71
Language:
english
Pages:
4
DOI:
10.3103/s1062873807010182
Date:
January, 2007
File:
PDF, 192 KB
english, 2007
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