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Depth-profile analysis of nanostructures by SIMS: Depth resolution function
Yu. Kudriavtsev, S. Gallardo, A. Villegas, G. Ramirez, R. AsomozaVolume:
72
Language:
english
Pages:
4
DOI:
10.3103/s1062873808070058
Date:
July, 2008
File:
PDF, 152 KB
english, 2008