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Depth range of primary electrons, electron beam broadening, and spatial resolution in electron-beam studies
F. A. Lukiyanov, E. I. Rau, R. A. SennovVolume:
73
Language:
english
Pages:
9
DOI:
10.3103/s1062873809040029
Date:
April, 2009
File:
PDF, 248 KB
english, 2009