Peculiarities of nanostructured silicon carbide films and...

Bulletin of the Russian Academy of Sciences: Physics 2009 / 10 Vol. 73; Iss. 10

Peculiarities of nanostructured silicon carbide films and coatings obtained by novel technique

K. N. Filonov, V. N. Kurlov, N. V. Klassen, E. A. Kudrenko, E. A. Shteinman
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Volume:
73
Language:
english
Pages:
3
DOI:
10.3103/s1062873809100153
Date:
October, 2009
File:
PDF, 190 KB
english, 2009
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