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Mo-based EUV multilayer filters with enhanced thermal stability
M. N. Drozdov, E. B. Kluenkov, A. Ya. Lopatin, V. I. Luchin, A. E. Pestov, N. N. Salashchenko, N. N. Tsybin, N. I. Chkhalo, L. A. ShmaenokVolume:
75
Language:
english
Pages:
3
DOI:
10.3103/s1062873811010072
Date:
January, 2011
File:
PDF, 172 KB
english, 2011