Evolution of the roughness of amorphous quartz surfaces and...

Bulletin of the Russian Academy of Sciences: Physics 2011 / 01 Vol. 75; Iss. 1

Evolution of the roughness of amorphous quartz surfaces and Cr/Sc multilayer structures upon exposure to ion-beam etching

Yu. A. Vainer, M. V. Zorina, A. E. Pestov, N. N. Salashchenko, N. I. Chkhalo, R. A. Khramkov
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Volume:
75
Language:
english
Pages:
3
DOI:
10.3103/s1062873811010254
Date:
January, 2011
File:
PDF, 149 KB
english, 2011
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