A stand for a projection EUV nanolithographer-multiplicator with a design resolution of 30 nm
D. G. Volgunov, I. G. Zabrodin, B. A. Zakalov, S. Yu. Zuev, I. A. Kas’kov, E. B. Kluenkov, A. E. Pestov, V. N. Polkovnikov, N. N. Salashchenko, L. A. Suslov, M. N. Toropov, N. I. ChkhaloVolume:
75
Language:
english
Pages:
4
DOI:
10.3103/s1062873811010278
Date:
January, 2011
File:
PDF, 416 KB
english, 2011