Development of methods and instruments for optical ellipsometry at the Institute of Semiconductor Physics of the Siberian Branch of the Russian Academy of Sciences
E. V. Spesivtsev, S. V. Rykhlitskii, V. A. ShvetsVolume:
47
Language:
english
Pages:
7
DOI:
10.3103/s8756699011050219
Date:
October, 2011
File:
PDF, 268 KB
english, 2011