Low-Frequency Glow Discharge Deposition of a Silicon...

High Energy Chemistry 2001 / 03 Vol. 35; Iss. 2

Low-Frequency Glow Discharge Deposition of a Silicon Dioxide Film onto the Surface of Glass Microspheres

V. M. Izgorodin, Yu. V. Tolokonnikova, A. A. Aushev, E. G. Orlikova, I. V. Sevryugin
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Volume:
35
Language:
english
Pages:
5
DOI:
10.1023/a:1004177624042
Date:
March, 2001
File:
PDF, 82 KB
english, 2001
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