Investigating the influence of fabrication process and crystal orientation on shear strength of silicon microcomponents
Quanfang Chen, Da-Jeng Yao, Chang-Jin Kim, G. P. CarmanVolume:
35
Language:
english
Pages:
10
DOI:
10.1023/a:1004873029495
Date:
November, 2000
File:
PDF, 972 KB
english, 2000