Thermal chemical vapour deposition of copper films from copper ethylacetoacetate: microstructure and electrical resistivity
Anjana Devi, S. A. ShivashankarVolume:
17
Language:
english
Pages:
3
DOI:
10.1023/a:1006518714011
Date:
March, 1998
File:
PDF, 358 KB
english, 1998