Additive oxygen effects in Cl2 plasma etching of chrome...

Journal of Materials Science Letters 1999 / 08 Vol. 18; Iss. 15

Additive oxygen effects in Cl2 plasma etching of chrome films

Kwang-Ho Kwon, Seung-Youl Kang, Sang-Ho Park, Hee-Kyung Sung, Dong-Keun Kim, Jong-Ha Moon
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
18
Language:
english
Pages:
4
DOI:
10.1023/a:1006642016630
Date:
August, 1999
File:
PDF, 123 KB
english, 1999
Conversion to is in progress
Conversion to is failed