Influence of Substrate Nature on the Microstructure of...

Journal of Materials Science Letters 1998 / 11 Vol. 17; Iss. 22

Influence of Substrate Nature on the Microstructure of LPCVD Silicon Films

B. Caussat, J. P. Couderc, E. Scheid, C. Bourgerette, B. de Mauduit
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Volume:
17
Language:
english
Pages:
3
DOI:
10.1023/a:1006696007150
Date:
November, 1998
File:
PDF, 75 KB
english, 1998
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