Microstructure characteristics of diamond-like nanocomposite (DLN) film by thermally activated chemical vapor deposition
Won Jae Yang, Keun Ho Auh, C. Li, K. NiiharaVolume:
19
Language:
english
Pages:
3
DOI:
10.1023/a:1006766110606
Date:
September, 2000
File:
PDF, 145 KB
english, 2000