Development of the SC-RTA Process for Fabrication of Sol-Gel Based Silica-on-Silicon Integrated Optic Components
R.R.A. Syms, A.S. Holmes, W. Huang, V.M. Schneider, M. GreenVolume:
13
Year:
1998
Language:
english
Pages:
8
DOI:
10.1023/a:1008606220011
File:
PDF, 841 KB
english, 1998