The Effect of HF in a Two-Step Sol-Gel Process of TEOS
T.N.M. Bernards, M.J. Van Bommel, J.A.J. JansenVolume:
13
Year:
1998
Language:
english
Pages:
4
DOI:
10.1023/a:1008613626739
File:
PDF, 47 KB
english, 1998