The Effect of Barrier Layer Composition and Structure on the Crystallization of PZT Coatings on Silicon
D.P. Birnie III, M.H. Jilavi, T. Krajewski, R. NaßVolume:
13
Year:
1998
Language:
english
Pages:
5
DOI:
10.1023/a:1008654703057
File:
PDF, 163 KB
english, 1998