Effect of carrier gas on metal-organic chemical vapour...

Effect of carrier gas on metal-organic chemical vapour deposition of aluminium from dimethylethylamine alane

Jong-Ho Yun, Shi-Woo Rhee
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Volume:
9
Pages:
4
DOI:
10.1023/a:1008970531123
Date:
February, 1998
File:
PDF, 14.37 MB
1998
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