High dielectric AlN/Al2O3composite powder using a plasma spray approach for microelectronics application
F. Y. C. Boey, L. Sun, X. Song, K. A. KhorVolume:
10
Language:
english
Pages:
5
DOI:
10.1023/a:1008978314036
Date:
July, 1999
File:
PDF, 164 KB
english, 1999