Formation of Porous Silicon Filter Structures with Different Properties on Small Areas
R. Arens-Fischer, M. Krüger, M. Thönissen, V. Ganse, D. Hunkel, M. Marso, H. LüthVolume:
7
Language:
english
Pages:
3
DOI:
10.1023/a:1009651224071
Date:
January, 2000
File:
PDF, 160 KB
english, 2000