Filtration of Sub-100 nm Particles Using a Bulk-Micromachined, Direct-Bonded Silicon Filter
Jay K. Tu, Tony Huen, Robert Szema, Mauro FerrariVolume:
1
Language:
english
Pages:
7
DOI:
10.1023/a:1009944423778
Date:
June, 1999
File:
PDF, 142 KB
english, 1999