Early stages of oxygen aggregation and thermal donors in...

Journal of Materials Science: Materials in Electronics 2001 / 06 Vol. 12; Iss. 4-6

Early stages of oxygen aggregation and thermal donors in silicon annealed under hydrostatic pressure

V. V. Emtsev Jr, C. A. J. Ammerlaan, B. A. Andreev, V. V. Emtsev, G. A. Oganesyan, A. Misiuk, C. A. Londos
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Volume:
12
Language:
english
Pages:
3
DOI:
10.1023/a:1011251101905
Date:
June, 2001
File:
PDF, 248 KB
english, 2001
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