Electrical characterization of shallow cobalt-silicided junctions
E. Simoen, A. Poyai, C. Claeys, N. Lukyanchikova, M. Petrichuk, N. Garbar, A. Czerwinski, J. Katcki, J. Ratajczak, E. GaubasVolume:
12
Language:
english
Pages:
4
DOI:
10.1023/a:1011268400088
Date:
June, 2001
File:
PDF, 306 KB
english, 2001