Cleaning and Doping of Silicon in a BF3Plasma during...

Russian Microelectronics 2001 / 07 Vol. 30; Iss. 4

Cleaning and Doping of Silicon in a BF3Plasma during Fabrication of Ohmic Contacts

A. L. Danilyuk, Yu. P. Snitovskii
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
30
Language:
english
Pages:
6
DOI:
10.1023/a:1011358730454
Date:
July, 2001
File:
PDF, 51 KB
english, 2001
Conversion to is in progress
Conversion to is failed