The structural and acoustic properties of sputtered aluminum nitride on ST-X quartz
Sean Wu, Long Wu, Feng-Chih Chang, Yu-Tang Shen, Jia-Hua ChangVolume:
20
Language:
english
Pages:
3
DOI:
10.1023/a:1012583016260
Date:
October, 2001
File:
PDF, 138 KB
english, 2001