Synthesis of Monosilane by Catalytic Disproportionation of...

Synthesis of Monosilane by Catalytic Disproportionation of Trichlorosilane in a Reaction-Rectification Apparatus with Recycle

V. M. Vorotyntsev, G. M. Mochalov, O. V. Nipruk
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Volume:
74
Language:
english
Pages:
5
DOI:
10.1023/a:1012718901275
Date:
April, 2001
File:
PDF, 46 KB
english, 2001
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