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Tunable Diode Laser Absorption Studies of Hydrocarbons in RF Plasmas Containing Hexamethyldisiloxane
J. Röpcke, G. Revalde, M. Osiac, K. Li, J. MeichsnerVolume:
22
Language:
english
Pages:
21
DOI:
10.1023/a:1012996700044
Date:
March, 2002
File:
PDF, 170 KB
english, 2002