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A new fabrication technique for photonic crystals: Nanolithography combined with alternating-layer deposition
E. Kuramochi, M. Notomi, T. Kawashima, J. Takahashi, C. Takahashi, T. Tamamura, S. KawakamiVolume:
34
Language:
english
Pages:
9
DOI:
10.1023/a:1013326610166
Date:
January, 2002
File:
PDF, 945 KB
english, 2002