Lubrication of Microelectromechanical Systems (MEMS) Using Bound and Mobile Phases of Fomblin Zdol®
Kalathil C. Eapen, Steven T. Patton, Jeffrey S. ZabinskiVolume:
12
Language:
english
Pages:
7
DOI:
10.1023/a:1013971321480
Date:
January, 2002
File:
PDF, 178 KB
english, 2002