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Etch characteristics of Pt by using BCl3/Cl2-gas mixtures
Kwang-Ho Kwon, Seung-Youl Kang, Sung-Ihl Kim, Nam-Kwan HongVolume:
13
Language:
english
Pages:
5
DOI:
10.1023/a:1014872314719
Date:
April, 2002
File:
PDF, 366 KB
english, 2002