Toward28Si through Trichlorosilane1

Inorganic Materials 2002 / 05 Vol. 38; Iss. 5

Toward28Si through Trichlorosilane1

A. P. Babichev, Z. Ya. Zhernova, A. V. Kurochkin, A. A. Mishachev, G. E. Popov, A. I. Rudnev, A. V. Tikhomirov
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Volume:
38
Language:
english
Pages:
2
DOI:
10.1023/a:1015498300512
Date:
May, 2002
File:
PDF, 18 KB
english, 2002
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