Simulations Based Design for a Large Displacement...

Simulations Based Design for a Large Displacement Electrostatically Actuated Microrelay

Gooi Boon Chong, Kam See Hoon, Ijaz H. Jafri, Daniel J. Keating
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Volume:
32
Language:
english
Pages:
10
DOI:
10.1023/a:1016019607584
Date:
July, 2002
File:
PDF, 256 KB
english, 2002
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