Modelling and Experiment of a Silicon Resonant Pressure...

Analog Integrated Circuits and Signal Processing 2002 / 07 Vol. 32; Iss. 1

Modelling and Experiment of a Silicon Resonant Pressure Sensor

Zheng Cui, Deyong Chen, Shanhong Xia
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Volume:
32
Language:
english
Pages:
7
DOI:
10.1023/a:1016067523514
Date:
July, 2002
File:
PDF, 148 KB
english, 2002
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