An Ion-Beam Apparatus for the Formation of Oxide Films by...

Instruments and Experimental Techniques 2001 / 05 Vol. 44; Iss. 3

An Ion-Beam Apparatus for the Formation of Oxide Films by the Oxygen Ion Sputtering Technique

A. I. Stognij, V. T. Svirin, S. D. Tushina, N. N. Novitskii, T. M. Protazanova
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Volume:
44
Language:
english
Pages:
4
DOI:
10.1023/a:1017509514910
Date:
May, 2001
File:
PDF, 96 KB
english, 2001
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