WO3 thin film prepared by PECVD technique and its gas...

Journal of Materials Science 2001 / 05 Vol. 36; Iss. 10

WO3 thin film prepared by PECVD technique and its gas sensing properties to NO2

Maosong Tong, Guorui Dai, Yuanda Wu, Xiuli He, Dingsan Gao
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Volume:
36
Language:
english
Pages:
4
DOI:
10.1023/a:1017950619864
Date:
May, 2001
File:
PDF, 71 KB
english, 2001
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