Improvement of interface morphology between...

Journal of Materials Science Letters 2002 / 02 Vol. 21; Iss. 4

Improvement of interface morphology between titanium-silicide and poly-Si thin film using Ar plasma treatment

Jae-Moon Choi, Dae-Jung Kim, Hyoung-In Kim, Myoung-Gi So
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Volume:
21
Language:
english
Pages:
4
DOI:
10.1023/a:1017952627051
Date:
February, 2002
File:
PDF, 824 KB
english, 2002
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