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Hardness, elastic modulus and structure of indium nitride...

Hardness, elastic modulus and structure of indium nitride thin films on AlN-nucleated sapphire substrates

J. H EDGAR, C. H WEI, D. T SMITH, T. J KISTENMACHER, W. A BRYDEN
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Volume:
8
Language:
english
Pages:
6
DOI:
10.1023/a:1018587306451
Date:
October, 1997
File:
PDF, 670 KB
english, 1997
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