Hardness, elastic modulus and structure of indium nitride thin films on AlN-nucleated sapphire substrates
J. H EDGAR, C. H WEI, D. T SMITH, T. J KISTENMACHER, W. A BRYDENVolume:
8
Language:
english
Pages:
6
DOI:
10.1023/a:1018587306451
Date:
October, 1997
File:
PDF, 670 KB
english, 1997